MicroSense, LLC, A KLA Company
Semiconductor ManufacturingMassachusetts, United States11-50 Employees
MicroSense, LLC, a KLA company, is based in Lowell, Massachusetts, and serves the semiconductor manufacturing sector. The firm specializes in precision wafer measurement, providing systems that assess flatness, thickness, bow, and warp on 200-mm bare silicon wafers. It also offers MRAM wafer metrology to characterize the magnetic properties of multi-layer wafers used in perpendicular MRAM development, as well as thin-film stress measurement systems that map wafer shape and stress before and after deposition. These capabilities support process control and development across wafer fabrication and advanced memory technologies. Additional instruments monitor back grind thickness and total thickness variation on thinned wafers, contributing to process control during grinding. The portfolio includes vibrating sample magnetometers and precision capacitive sensors to measure magnetic characteristics and enable nanometer-scale displacement measurement. As a smaller, focused organization within the KLA family, MicroSense leverages the broader resources of its parent while maintaining a specialist metrology footprint in the semiconductor supply chain.
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